Please use this identifier to cite or link to this item: http://hdl.handle.net/2067/33550
Title: Fluorinated Amorphous Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition for Solar Cell Applications
Authors: Valentini, L.
Salerni, V.
Armentano, Ilaria 
Kenny, J. M.
Lozzi, L.
Santucci, S.
Journal: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A, AN INTERNATIONAL JOURNAL DEVOTED TO VACUUM, SURFACES, AND FILMS 
Issue Date: 2003
URI: http://hdl.handle.net/2067/33550
Appears in Collections:A1. Articolo in rivista

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