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http://hdl.handle.net/2067/33550
Title: | Fluorinated Amorphous Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition for Solar Cell Applications | Authors: | Valentini, L. Salerni, V. Armentano, Ilaria Kenny, J. M. Lozzi, L. Santucci, S. |
Journal: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A, AN INTERNATIONAL JOURNAL DEVOTED TO VACUUM, SURFACES, AND FILMS | Issue Date: | 2003 | URI: | http://hdl.handle.net/2067/33550 |
Appears in Collections: | A1. Articolo in rivista |
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