Fluorinated Amorphous Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition for Solar Cell Applications
Author(s)
Date Issued
2003
Type
article
Volume
21
Issue
21
Start Page
1784
End Page
1790
ISSN
15531813
Conference(s)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A, AN INTERNATIONAL JOURNAL DEVOTED TO VACUUM, SURFACES, AND FILMS