Positive ion chemistry of SiH4/NF3 gaseous mixtures studied by ion trap mass spectrometry
Author(s)
Date Issued
2009
Type
article
Volume
15
Issue
15
Start Page
209
End Page
220
ISSN
14690667
Conference(s)
EUROPEAN JOURNAL OF MASS SPECTROMETRY
Positive ion chemistry of SiH4/NF3 gaseous mixtures studied by ion trap mass spectrometry